Search Plasma ALD Publication Database By...

Films
Precursors
Deposition Hardware
Authors
Film and Plasma Characteristics
Multi-factor Search

Submit your own paper for the database here

Publication Information

Title: Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes

Type: Journal

Info: J. Vac. Sci. Technol. A 28(1), Jan/Feb 2010

Date: 2009-12-09

DOI: http://dx.doi.org/10.1116/1.3256227

Author Information

Name

Institution

Adriaan J. M. Mackus

Eindhoven University of Technology

S. B. S. Heil

Eindhoven University of Technology

E. Langereis

Eindhoven University of Technology

Harm C. M. Knoops

Eindhoven University of Technology

Mauritius C. M. (Richard) van de Sanden

Eindhoven University of Technology

Erwin (W.M.M.) Kessels

Eindhoven University of Technology

Films

Plasma Al2O3 using Custom

Deposition Temperature Range N/A

TMA, Trimethyl Aluminum, Trimethylalane, Trimethylaluminium, Aluminium Trimethyl, Aluminum Trimethanide, Al(CH3)3, AlMe3, Al2(CH3)6, Al2Me6

75-24-1

Where to buy precursor

Oxygen, O2

7782-44-7

Plasma Al2O3 using Oxford Instruments FlexAL

Deposition Temperature Range N/A

TMA, Trimethyl Aluminum, Trimethylalane, Trimethylaluminium, Aluminium Trimethyl, Aluminum Trimethanide, Al(CH3)3, AlMe3, Al2(CH3)6, Al2Me6

75-24-1

Where to buy precursor

Oxygen, O2

7782-44-7

Plasma Ta2O5 using Custom

Deposition Temperature Range N/A

Ta(NMe2)5, Pentakis(DiMethylAmino)Tantalum, PDMAT

19824-59-0

Where to buy precursor

Oxygen, O2

7782-44-7

Plasma TaNx using Custom

Deposition Temperature Range N/A

Ta(NMe2)5, Pentakis(DiMethylAmino)Tantalum, PDMAT

19824-59-0

Where to buy precursor

Nitrogen, N2

7727-37-9

Hydrogen, H2

1333-74-0

Plasma TiN using Oxford Instruments FlexAL

Deposition Temperature Range N/A

Titanium Tetrachloride, TiCl4

7550-45-0

Where to buy precursor

Nitrogen, N2

7727-37-9

Hydrogen, H2

1333-74-0

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

OES

OES, Optical Emission Spectroscopy

Ocean Optics UBS 4000-UV-VIS

Substrates

Keywords

Notes

110

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

Follow plasma-ald.com on Twitter

Follow @PlasmaALDGuy

Shortcuts

Films
Precursors
Deposition Hardware
Authors
Film and Plasma Characteristics
Multi-factor Search
ALD and PEALD Background
On-line PEALD Theses
About plasma-ald.com

Contact Us

© 2014-2018 plasma-ald.com