Your search for plasma enhanced atomic layer deposition publications authored by E. Langereis returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma|
|2||In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3|
|3||Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films|
|4||Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes|
|5||Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas|
|6||Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors|
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