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E. Langereis Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by E. Langereis returned 14 record(s).

NumberTitle
1Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers
2Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied by infrared spectroscopy
3Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
4Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
5In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
6Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
7Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition
8Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
9Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3
10Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
11Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
12In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
13Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
14Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications