E. Langereis Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by E. Langereis returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
2In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
3Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
4Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
5Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
6Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
7Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
8Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors


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