E. Langereis Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by E. Langereis returned 11 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
2In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
3In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
4Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
5Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
6Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
7Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
8Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
9Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
10Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
11Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition


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