E. Langereis Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by E. Langereis returned 14 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
2Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
3In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
4Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
5Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied by infrared spectroscopy
6Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
7Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers
8Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
9In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
10Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
11Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition
12Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3
13Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
14Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition