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Adriaan J. M. Mackus Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Adriaan J. M. Mackus returned 18 record(s).

NumberTitle
1In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
2Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition
3Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
4Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
5Reaction Mechanisms during Atomic Layer Deposition of AlF3 Using Al(CH3)3 and SF6 Plasma
6Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
7Remote Plasma ALD of Platinum and Platinum Oxide Films
8Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
9Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers
10Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
11Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle
12Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
13Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
14Area-Selective Atomic Layer Deposition of In2O3:H Using a ยต-Plasma Printer for Local Area Activation
15Atomic Layer Deposition of Cobalt Using H2-, N2-, and NH3-Based Plasmas: On the Role of the Co-reactant
16Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
17Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma
18Room-Temperature Atomic Layer Deposition of Platinum