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Adriaan J. M. Mackus Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Adriaan J. M. Mackus returned 18 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Remote Plasma ALD of Platinum and Platinum Oxide Films
2Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
3Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
4Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
5Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle
6Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
7Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
8Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition
9In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
10Reaction Mechanisms during Atomic Layer Deposition of AlF3 Using Al(CH3)3 and SF6 Plasma
11Area-Selective Atomic Layer Deposition of In2O3:H Using a ยต-Plasma Printer for Local Area Activation
12Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
13Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers
14Atomic Layer Deposition of Cobalt Using H2-, N2-, and NH3-Based Plasmas: On the Role of the Co-reactant
15Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma
16Room-Temperature Atomic Layer Deposition of Platinum
17Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
18Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas