Adriaan J. M. Mackus Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Adriaan J. M. Mackus returned 12 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
2	Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle
3	Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
4	Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
5	Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
6	In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
7	Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
8	Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
9	Remote Plasma ALD of Platinum and Platinum Oxide Films
10	Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
11	Room-Temperature Atomic Layer Deposition of Platinum
12	Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy

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