Adriaan J. M. Mackus Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Adriaan J. M. Mackus returned 12 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
2Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle
3Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
4Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
5Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
6In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
7Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
8Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
9Remote Plasma ALD of Platinum and Platinum Oxide Films
10Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
11Room-Temperature Atomic Layer Deposition of Platinum
12Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy


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