Publication Information

Title:
Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
Type:
Journal
Info:
Chem. Mater., 2012, 24 (10), pp 1752-1761
Date:
2012-04-17

Author Information

Name Institution
Adriaan J. M. MackusEindhoven University of Technology
NoƩmi LeickEindhoven University of Technology
Layton BakerUniversity of Colorado, Boulder
Erwin (W.M.M.) KesselsEindhoven University of Technology

Films

Plasma Pt


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Substrates

Keywords

Notes

Strong Pt ALD literature review.
Paper exists as chapter 3 in thesis downloadable at http://alexandria.tue.nl/extra2/754694.pdf
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