Noémi Leick Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Noémi Leick returned 5 record(s).

Number	Title
1	Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
2	Atomic layer deposition of Ru from CpRu(CO)₂Et using O₂ gas and O₂ plasma
3	Surface reactions of aminosilane precursors during N₂ plasma-assisted atomic layer deposition of SiN_x
4	In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
5	Plasma-Assisted Atomic Layer Deposition of SrTiO₃: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry