Inductively coupled plasma sources from Plasma ALD, LLC.


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Layton Baker Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Layton Baker returned 2 record(s).

NumberTitle
1Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
2Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum