Mauritius C. M. (Richard) van de Sanden Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mauritius C. M. (Richard) van de Sanden returned 48 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3
2Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
3Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
4Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
5Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
6Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
7Synergy Between Plasma-Assisted ALD and Roll-to-Roll Atmospheric Pressure PE-CVD Processing of Moisture Barrier Films on Polymers
8Surface passivation of phosphorus-diffused n+-type emitters by plasma-assisted atomic-layer deposited Al2O3
9Silicon surface passivation by ultrathin Al2O3 films synthesized by thermal and plasma atomic layer deposition
10Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
11Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
12Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition
13Remote Plasma ALD of Platinum and Platinum Oxide Films
14Plasma and Thermal ALD of Al2O3 in a Commercial 200mm ALD Reactor
15In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
16Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
17Hydrogen induced passivation of Si interfaces by Al2O3 films and SiO2/Al2O3 stacks
18Role of field-effect on c-Si surface passivation by ultrathin (2-20 nm) atomic layer deposited Al2O3
19Influence of the Deposition Temperature on the c-Si Surface Passivation by Al2O3 Films Synthesized by ALD and PECVD
20Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
21Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2
22Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers
23Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
24Stability of Al2O3 and Al2O3/a-Six:H stacks for surface passivation of crystalline silicon
25Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
26Enhancing the Wettability of High Aspect-Ratio Through-Silicon Vias Lined With LPCVD Silicon Nitride or PE-ALD Titanium Nitride for Void-Free Bottom-Up Copper Electroplating
27Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3
28Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction
29Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
30Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
31Plasma-assisted atomic layer deposition of TiN/Al2O3 stacks for metal-oxide-semiconductor capacitor applications
32The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
33Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
34Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
35Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition
36Influence of annealing and Al2O3 properties on the hydrogen-induced passivation of the Si/SiO2 interface
37Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
38Excellent Si surface passivation by low temperature SiO2 using an ultrathin Al2O3 capping film
39Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
40Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied by infrared spectroscopy
41In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
42In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
43Dielectric Properties of Thermal and Plasma-Assisted Atomic Layer Deposited Al2O3 Thin Films
44Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
45Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
46Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
47Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
48Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition