Mauritius C. M. (Richard) van de Sanden Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mauritius C. M. (Richard) van de Sanden returned 47 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
2Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3
3Influence of the Deposition Temperature on the c-Si Surface Passivation by Al2O3 Films Synthesized by ALD and PECVD
4Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2
5Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
6Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction
7Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
8Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
9Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
10In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
11Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers
12Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
13Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
14Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
15Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
16Influence of annealing and Al2O3 properties on the hydrogen-induced passivation of the Si/SiO2 interface
17Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
18Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
19Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
20Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
21Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied by infrared spectroscopy
22Plasma-assisted atomic layer deposition of TiN/Al2O3 stacks for metal-oxide-semiconductor capacitor applications
23Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
24Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
25Hydrogen induced passivation of Si interfaces by Al2O3 films and SiO2/Al2O3 stacks
26Excellent Si surface passivation by low temperature SiO2 using an ultrathin Al2O3 capping film
27Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition
28Silicon surface passivation by ultrathin Al2O3 films synthesized by thermal and plasma atomic layer deposition
29In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
30Remote Plasma ALD of Platinum and Platinum Oxide Films
31The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
32Dielectric Properties of Thermal and Plasma-Assisted Atomic Layer Deposited Al2O3 Thin Films
33Enhancing the Wettability of High Aspect-Ratio Through-Silicon Vias Lined With LPCVD Silicon Nitride or PE-ALD Titanium Nitride for Void-Free Bottom-Up Copper Electroplating
34Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
35Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
36Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
37Stability of Al2O3 and Al2O3/a-Six:H stacks for surface passivation of crystalline silicon
38Role of field-effect on c-Si surface passivation by ultrathin (2-20 nm) atomic layer deposited Al2O3
39In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
40Surface passivation of phosphorus-diffused n+-type emitters by plasma-assisted atomic-layer deposited Al2O3
41Synergy Between Plasma-Assisted ALD and Roll-to-Roll Atmospheric Pressure PE-CVD Processing of Moisture Barrier Films on Polymers
42Co3O4 as Anode Material for Thin Film ĀµBatteries prepared by Remote Plasma Atomic Layer Deposition
43Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3
44Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
45Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
46Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition
47Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma