Mauritius C. M. (Richard) van de Sanden Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mauritius C. M. (Richard) van de Sanden returned 35 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
2Co3O4 as Anode Material for Thin Film ĀµBatteries prepared by Remote Plasma Atomic Layer Deposition
3Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
4Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
5Dielectric Properties of Thermal and Plasma-Assisted Atomic Layer Deposited Al2O3 Thin Films
6Excellent Si surface passivation by low temperature SiO2 using an ultrathin Al2O3 capping film
7Hydrogen induced passivation of Si interfaces by Al2O3 films and SiO2/Al2O3 stacks
8In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
9In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
10Influence of annealing and Al2O3 properties on the hydrogen-induced passivation of the Si/SiO2 interface
11Influence of the Deposition Temperature on the c-Si Surface Passivation by Al2O3 Films Synthesized by ALD and PECVD
12Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
13Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
14Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
15Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
16Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2
17Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
18Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
19Plasma-assisted atomic layer deposition of TiN/Al2O3 stacks for metal-oxide-semiconductor capacitor applications
20Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
21Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
22Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
23Remote Plasma ALD of Platinum and Platinum Oxide Films
24Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
25Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
26Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
27Role of field-effect on c-Si surface passivation by ultrathin (2-20 nm) atomic layer deposited Al2O3
28Silicon surface passivation by ultrathin Al2O3 films synthesized by thermal and plasma atomic layer deposition
29Stability of Al2O3 and Al2O3/a-Six:H stacks for surface passivation of crystalline silicon
30Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
31Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
32Surface passivation of phosphorus-diffused n+-type emitters by plasma-assisted atomic-layer deposited Al2O3
33Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
34Synergy Between Plasma-Assisted ALD and Roll-to-Roll Atmospheric Pressure PE-CVD Processing of Moisture Barrier Films on Polymers
35The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides


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