Publication Information

Title:
Synergy Between Plasma-Assisted ALD and Roll-to-Roll Atmospheric Pressure PE-CVD Processing of Moisture Barrier Films on Polymers
Type:
Journal
Info:
Plasma Processes and Polymers, 13(3), 311-315
Date:
2015-08-17

Author Information

Name Institution
Sergey A. StarostinDutch Institute For Fundamental Energy Research (DIFFER)
Wytze KeuningEindhoven University of Technology
Jean-Paul SchalkenEindhoven University of Technology
Mariadriana CreatoreEindhoven University of Technology
Erwin (W.M.M.) KesselsEindhoven University of Technology
Jan B. BouwstraFUJIFILM Manufacturing Europe B.V.
Mauritius C. M. (Richard) van de SandenEindhoven University of Technology
Hindrik W. de VriesDutch Institute For Fundamental Energy Research (DIFFER)

Films

Plasma Al2O3


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Water Vapor Transmission Rate (WVTR)

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Calcium Test

Substrates

PEN, Polyethylene Napthalate
SiO2
Silicon
Calcium

Keywords

Diffusion Barrier

Notes

537