Publication Information

Title: Synergy Between Plasma-Assisted ALD and Roll-to-Roll Atmospheric Pressure PE-CVD Processing of Moisture Barrier Films on Polymers

Type: Journal

Info: Plasma Processes and Polymers, 13(3), 311-315

Date: 2015-08-17

DOI: http://dx.doi.org/10.1002/ppap.201500096

Author Information

Name

Institution

Dutch Institute For Fundamental Energy Research (DIFFER)

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

FUJIFILM Manufacturing Europe B.V.

Eindhoven University of Technology

Dutch Institute For Fundamental Energy Research (DIFFER)

Films

Deposition Temperature = 80C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

-

Water Vapor Transmission Rate (WVTR)

Water Vapor Transmission Rate (WVTR)

Technolox Deltaperm

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Park Systems, NX10

Water Vapor Transmission Rate (WVTR)

Calcium Test

Custom

Substrates

PEN, Polyethylene Napthalate

SiO2

Silicon

Calcium

Keywords

Diffusion Barrier

Notes

537



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