Publication Information

Title: Synergy Between Plasma-Assisted ALD and Roll-to-Roll Atmospheric Pressure PE-CVD Processing of Moisture Barrier Films on Polymers

Type: Journal

Info: Plasma Proc PolymersPPAP:PPAP201500096, author = {Starostin, Sergey A. and Keuning, Wytze and Schalken, Jean-Paul and Creatore, Mariadriana and Kessels, Wilhelmus M. M. (Erwin) and Bouwstra, Jan B. and (Richard) van de Sanden, Mauritius C. M. and de Vri

Date: 2015-08-17

DOI: http://dx.doi.org/10.1002/ppap.201500096

Author Information

Name

Institution

Dutch Institute For Fundamental Energy Research (DIFFER)

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

FUJIFILM Manufacturing Europe B.V.

Eindhoven University of Technology

Dutch Institute For Fundamental Energy Research (DIFFER)

Films

Deposition Temperature = 80C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

Unknown

Water Vapor Transmission Rate (WVTR)

Water Vapor Transmission Rate (WVTR)

Technolox Deltaperm

Substrates

PEN, Polyethylene Napthalate

SiO2

Silicon

Keywords

Diffusion Barrier

Notes

537



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