Wytze Keuning Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Wytze Keuning returned 6 record(s).

Number	Title
1	Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
2	Influence of stoichiometry on the performance of MIM capacitors from plasma-assisted ALD Sr_xTi_yO_z films
3	Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
4	Synergy Between Plasma-Assisted ALD and Roll-to-Roll Atmospheric Pressure PE-CVD Processing of Moisture Barrier Films on Polymers
5	Plasma-Assisted ALD for the Conformal Deposition of SiO₂: Process, Material and Electronic Properties
6	Cathode encapsulation of organic light emitting diodes by atomic layer deposited Al₂O₃ films and Al₂O₃/a-SiN_x:H stacks