Publication Information

Title:
Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition
Type:
Journal
Info:
Journal of Power Sources, Volume 203, 1 April 2012, Pages 72-77.
Date:
2012-04-01

Author Information

Name Institution
Merijn E. DondersEindhoven University of Technology
Harm C. M. KnoopsEindhoven University of Technology
Mauritius C. M. (Richard) van de SandenEindhoven University of Technology
Erwin (W.M.M.) KesselsEindhoven University of Technology
Peter H. L. NottenEindhoven University of Technology

Films

Plasma CoOx


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: -

Characteristic: Chemical Composition, Impurities
Analysis: -

Characteristic: Density
Analysis: -

Characteristic: Morphology, Roughness, Topography
Analysis: -

Characteristic: Electrochemical Performance
Analysis: Charge/Discharge Cycling

Characteristic: Electrochemical Performance
Analysis: CV, Cyclic Voltammetry

Characteristic: Electrochemical Performance
Analysis: GITT, Galvanostatic Intermittent Titration Technique

Characteristic: Electrochemical Performance
Analysis: EIS, Electrochemical Impedance Spectroscopy

Substrates

TiN

Keywords

Batteries
Cobalt oxide
Atomic Layer Deposition
Lithium-ion
Anode
PEALD Film Development

Notes

17