Publication Information

Title: Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition

Type: Journal

Info: Journal of Power Sources, Volume 203, 1 April 2012, Pages 72-77.

Date: 2012-04-01

DOI: http://dx.doi.org/10.1016/j.jpowsour.2011.12.020

Author Information

Name

Institution

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Films

Plasma CoOx using Unknown

Deposition Temperature Range = 100-400C

1277-43-6

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

-

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

Unknown

-

Chemical Composition, Impurities

Unknown

-

Density

Unknown

-

Morphology, Roughness, Topography

Unknown

-

Electrochemical Performance

Charge/Discharge Cycling

-

Electrochemical Performance

CV, Cyclic Voltammetry

-

Electrochemical Performance

GITT, Galvanostatic Intermittent Titration Technique

-

Electrochemical Performance

EIS, Electrochemical Impedance Spectroscopy

-

Substrates

TiN

Keywords

Batteries

Cobalt oxide

Atomic Layer Deposition

Lithium-ion

Anode

PEALD Film Development

Notes

17



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