Peter H. L. Notten Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peter H. L. Notten returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic Layer Deposition of LiCoO2 Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries
2	Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition
3	Remote Plasma ALD of Platinum and Platinum Oxide Films
4	Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
5	Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
6	Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
7	Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2

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