Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Peter H. L. Notten Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peter H. L. Notten returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition
2Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2
3Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
4Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
5Remote Plasma ALD of Platinum and Platinum Oxide Films
6Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
7Atomic Layer Deposition of LiCoO2 Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries