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The publication database currently has 1658 entries.
204 Films
274 Precursors
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Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy Uniformity of HfO2 Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition Optimization of Y2O3 dopant concentration of yttria stabilized zirconia thin film electrolyte prepared by plasma enhanced atomic layer deposition for high performance thin film solid oxide fuel cells Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy Innovative remote plasma source for atomic layer deposition for GaN devices

Peter H. L. Notten Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peter H. L. Notten returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of LiCoO2 Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries
2Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition
3Remote Plasma ALD of Platinum and Platinum Oxide Films
4Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
5Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
6Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
7Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2

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