Peter H. L. Notten Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peter H. L. Notten returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of LiCoO2 Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries
2Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition
3Remote Plasma ALD of Platinum and Platinum Oxide Films
4Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
5Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
6Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
7Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2