Peter H. L. Notten Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peter H. L. Notten returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2
2Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
3Remote Plasma ALD of Platinum and Platinum Oxide Films
4Atomic Layer Deposition of LiCoO2 Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries
5Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
6Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition
7Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film