PDMAT, (NMe₂)₅Ta, Pentakis (DiMethylAmido) Tantalum, CAS# 19824-59-0

Where to buy

Number	Vendor	Link
1	Strem Chemicals, Inc.	Pentakis(dimethylamino)tantalum(V), 99%
2	Ereztech	Pentakis(dimethylamino)tantalum(V) (99.99%-Ta)
3	Gelest	Tantalum Pentakis(Dimethylamide)

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 17 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic layer deposition of amorphous Ni-Ta-N films for Cu diffusion barrier
2	Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas
3	Atomic layer deposition of Ta-based thin films: Reactions of alkylamide precursor with various reactants
4	Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
5	Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
6	Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
7	Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
8	Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
9	Atomic layer deposition of Ta-based thin films: Reactions of alkylamide precursor with various reactants
10	Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
11	Plasma-enhanced Atomic Layer Deposition of TaN Film and Its Resistance to Copper Diffusion
12	Properties of conductive nitride films prepared by plasma enhanced atomic layer deposition using quartz and sapphire plasma sources
13	Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
14	Robust TaNx diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition
15	Ru thin film grown on TaN by plasma enhanced atomic layer deposition
16	Ta-rich atomic layer deposition TaN adhesion layer for Cu interconnects by means of plasma-enhanced atomic layer deposition
17	Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode

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