Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
PDMAT, (NMe2)5Ta, Pentakis (DiMethylAmido) Tantalum, CAS# 19824-59-0
Where to buy
Number | Vendor | Link |
---|---|---|
1 | Ereztech | Pentakis(dimethylamino)tantalum(V) (99.99%-Ta) |
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 23 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |