S. B. S. Heil Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by S. B. S. Heil returned 12 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
2Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
3Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
4Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
5Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3
6Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers
7In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
8Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
9Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3
10Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
11Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
12Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma