S. B. S. Heil Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by S. B. S. Heil returned 12 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
2In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
3In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
4Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
5Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
6Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
7Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers
8Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
9Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
10Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
11Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3
12Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3