S. B. S. Heil Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by S. B. S. Heil returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
2Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3
3Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3
4Plasma and Thermal ALD of Al2O3 in a Commercial 200mm ALD Reactor
5Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers
6In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
7In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
8Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
9Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
10Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
11Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
12Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
13Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor