S. B. S. Heil Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by S. B. S. Heil returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma and Thermal ALD of Al2O3 in a Commercial 200mm ALD Reactor
2In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
3Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
4Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers
5Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
6Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
7In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
8Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3
9Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
10Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3
11Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
12Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
13Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes