Your search for plasma enhanced atomic layer deposition publications authored by S. B. S. Heil returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor|
|2||In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3|
|3||Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes|
|4||Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications|
|5||Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry|
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