Ta2O5 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ta2O5 films returned 22 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
2Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas
3Atomic layer deposition of Ta-based thin films: Reactions of alkylamide precursor with various reactants
4Comparative Studies of Atomic Layer Deposition and Plasma-Enhanced Atomic Layer Deposition Ta2O5 and the Effects on Electrical Properties of In situ Nitridation
5Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
6Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
7Development of a multianalyte optical sol-gel biosensor for medical diagnostic
8Highly Uniform, Electroforming-Free, and Self-Rectifying Resistive Memory in the Pt/Ta2O5/HfO2-x/TiN Structure
9Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control
10In Situ Control of Oxygen Vacancies in TaOx Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications
11Increment of the Dielectric Constant of Ta2O5 Thin Films by Retarding Interface Oxide Growth on Si Substrates
12Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
13Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
14Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
15Nanochemistry, nanostructure, and electrical properties of Ta2O5 film deposited by atomic layer deposition and plasma-enhanced atomic layer deposition
16Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
17Pt/Ta2O5/HfO2-x/Ti Resistive Switching Memory Competing with Multilevel NAND Flash
18Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
19Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps
20Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
21Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
22Trilayer Tunnel Selectors for Memristor Memory Cells


Shortcuts



© 2014-2019 plasma-ald.com