Ta2O5 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ta2O5 films returned 18 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
2Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas
3Atomic layer deposition of Ta-based thin films: Reactions of alkylamide precursor with various reactants
4Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
5Development of a multianalyte optical sol-gel biosensor for medical diagnostic
6Highly Uniform, Electroforming-Free, and Self-Rectifying Resistive Memory in the Pt/Ta2O5/HfO2-x/TiN Structure
7In Situ Control of Oxygen Vacancies in TaOx Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications
8Increment of the Dielectric Constant of Ta2O5 Thin Films by Retarding Interface Oxide Growth on Si Substrates
9Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
10Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
11Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
12Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
13Pt/Ta2O5/HfO2-x/Ti Resistive Switching Memory Competing with Multilevel NAND Flash
14Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
15Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps
16Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
17Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
18Trilayer Tunnel Selectors for Memristor Memory Cells


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