Topographically selective deposition
Type:
Journal
Info:
Applied Physics Letters 114, 043101 (2019)
Date:
2019-01-12
Author Information
| Name | Institution |
|---|---|
| Ahmad Chaker | Grenoble Alps University (UGA) |
| Christophe Vallée | Grenoble Alps University (UGA) |
| Vincent Pesce | Grenoble Alps University (UGA) |
| Samia Belahcen | Grenoble Alps University (UGA) |
| Rémi Vallat | Grenoble Alps University (UGA) |
| Rémy Gassilloud | CEA - LETI MINATEC |
| Nicolas Posseme | CEA - LETI MINATEC |
| Marceline Bonvalot | Grenoble Alps University (UGA) |
| Ahmad Bsiesy | Grenoble Alps University (UGA) |
Films
Plasma Ta2O5
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Sputter Rate
Analysis: Ellipsometry
Characteristic: Conformality, Step Coverage
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Selectivity
Analysis: SEM, Scanning Electron Microscopy
Substrates
| Silicon |
Notes
| 1485 |