Samia Belahcen Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Samia Belahcen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Topographically selective deposition|
|2||Control of ion energy during plasma enhanced atomic layer deposition: A new strategy for the modulation of TiN growth delay on SiO2|