Search 1616 plasma ALD publications by:
Tert-Butylimido,Tris(diMEthylamino)Tantalum, Ta[N(CH3)2]3[=NC(CH3)3], TBTMET, TBTDMT, CAS# 69039-11-8
Where to buy
|1||Strem Chemicals, Inc.||t-Butylimidotris(dimethylamido)tantalum(V), min. 98%, contained in 50 ml cylinder for CVD/ALD|
|2||Strem Chemicals, Inc.||t-Butylimidotris(dimethylamino)tantalum(V), min. 98%|
|3||Ereztech||tert-Butyl imidotris(dimethylamido) tantalum(V)|
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.