Search 1525 plasma ALD publications by:
Search 1525 plasma ALD publications by:
Publication Information
Title:
Development of a multianalyte optical sol-gel biosensor for medical diagnostic
Type:
Journal
Info:
Sensors and Actuators B: Chemical Volume 221, 31 December 2015, Pages 96-103
Date:
2015-06-01
Author Information
Name | Institution |
---|---|
M. Oubaha | Dublin City University |
A. Gorin | Dublin City University |
C. McDonagh | Dublin City University |
B. Duffy | Dublin Institute of Technology |
R. Copperwhite | Dublin City University |
Films
Plasma Ta2O5
Hardware used: Applied Materials 300mm ALD
Film/Plasma Properties
Substrates
Keywords
Medical |
Sensors |
Notes
451 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |