Publication Information

Title: Development of a multianalyte optical sol-gel biosensor for medical diagnostic

Type: Journal

Info: Sensors and Actuators B: Chemical Volume 221, 31 December 2015, Pages 96-103

Date: 2015-06-01

DOI: http://dx.doi.org/10.1016/j.snb.2015.06.012

Author Information

Name

Institution

M. Oubaha

Dublin City University

A. Gorin

Dublin City University

C. McDonagh

Dublin City University

B. Duffy

Dublin Institute of Technology

R. Copperwhite

Dublin City University

Films

Plasma Ta2O5 using Applied Materials 300mm ALD

Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Medical

Sensors

Notes

451


Mark Sowa

Shortcuts

Films
Precursors
Deposition Hardware
Authors
Film and Plasma Characteristics
Multi-factor Search
ALD and PEALD Background
On-line PEALD Theses
About plasma-ald.com

Contact Us
ALD Links

© 2014-2019 plasma-ald.com