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Correlation between ferroelectricity and ferroelectric orthorhombic phase of HfxZr1-xO2 thin films using synchrotron x-ray analysis
Experimental and theoretical determination of the role of ions in atomic layer annealing
Crystalline AlN Interfacial Layer on GaN Using Plasma-Enhanced Atomic Layer Deposition
Effect of cycling on ultra-thin HfZrO4, ferroelectric synaptic weights
Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature
Development of a multianalyte optical sol-gel biosensor for medical diagnostic
Type:
Journal
Info:
Sensors and Actuators B: Chemical Volume 221, 31 December 2015, Pages 96-103
Date:
2015-06-01
Author Information
| Name | Institution |
|---|---|
| M. Oubaha | Dublin City University |
| A. Gorin | Dublin City University |
| C. McDonagh | Dublin City University |
| B. Duffy | Dublin Institute of Technology |
| R. Copperwhite | Dublin City University |
Films
Plasma Ta2O5
Hardware used: Applied Materials 300mm ALD
Film/Plasma Properties
Substrates
Keywords
| Medical |
| Sensors |
Notes
| 451 |