Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Development of a multianalyte optical sol-gel biosensor for medical diagnostic

Type:
Journal
Info:
Sensors and Actuators B: Chemical Volume 221, 31 December 2015, Pages 96-103
Date:
2015-06-01
DOI:
http://dx.doi.org/10.1016/j.snb.2015.06.012

Author Information

Name Institution
M. OubahaDublin City University
A. GorinDublin City University
C. McDonaghDublin City University
B. DuffyDublin Institute of Technology
R. CopperwhiteDublin City University

Films

Plasma Ta2O5

Hardware used: Applied Materials 300mm ALD
Deposition Temperature Range N/A

Film/Plasma Properties

Substrates

Notes

451