Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Applied Materials 300mm ALD Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Applied Materials 300mm ALD hardware returned 3 records.

NumberTitle
1Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
2Development of a multianalyte optical sol-gel biosensor for medical diagnostic
3Island Coalescence during Film Growth: An Underestimated Limitation of Cu ALD