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Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications

Type:
Journal
Info:
Journal of Vacuum Science & Technology A 30, 01A103 (2012)
Date:
2011-07-20
DOI:
http://dx.doi.org/10.1116/1.3625566

Author Information

Name Institution
Johan SwertsIMEC
S. ArminiIMEC
L. CarbonellIMEC
Annelies DelabieIMEC
A. FranquetIMEC
S. MertensIMEC
Mihaela I. PopoviciIMEC
Marc SchaekersIMEC
T. WittersIMEC
Z. TökeiIMEC
G. BeyerIMEC
Sven Van ElshochtIMEC
V. GraveyApplied Materials
Andrew CockburnApplied Materials
K. ShahApplied Materials
Joseph AubuchonApplied Materials

Films

Plasma Ru

Hardware used: Applied Materials 300mm ALD
Methylcyclopentadienyl pyrrolyl ruthenium
CAS#: 0-0-0
N2, Nitrogen
CAS#: 7727-37-9
NH3, Ammonia
CAS#: 7664-41-7
Deposition Temperature = 330C

Plasma TiN

Hardware used: Unknown
Deposition Temperature = 370C

Film/Plasma Properties

Characteristic: Conformality, Step Coverage
Analysis: TEM, Transmission Electron Microscope
Diagnostic: -

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: KLA-Tencor Aleris

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: -

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: -

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Diagnostic: -

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Diagnostic: KLA-Tencor RS100

Characteristic: Chemical Composition, Impurities
Analysis: TOF-SIMS, Time of Flight Secondary Ion Mass Spectrometry
Diagnostic: ION TOF IV

Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: -

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: -

Substrates

SiO2
TiN
TaN

Notes

666