Sven Van Elshocht Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sven Van Elshocht returned 6 record(s).

Number	Title
1	Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
2	Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
3	Understanding the EOT-J_g degradation in Ru/SrTiO_x/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
4	Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides
5	Low temperature deposition of 2D WS₂ layers from WF₆ and H₂S precursors: impact of reducing agents
6	Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS₂ from WF₆, H₂ Plasma, and H₂S