Johan Swerts Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Johan Swerts returned 4 record(s).

Number	Title
1	Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
2	Fully CMOS BEOL compatible HfO₂ RRAM cell, with low (μA) program current, strong retention and high scalability, using an optimized plasma enhanced atomic layer deposition (PEALD) process for TiN electrode
3	Understanding the EOT-J_g degradation in Ru/SrTiO_x/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
4	Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing