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Mihaela I. Popovici Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mihaela I. Popovici returned 3 record(s).

NumberTitle
1Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
2Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
3Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition