Marc Schaekers Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marc Schaekers returned 3 record(s).

Number	Title
1	Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO₄-precursor and H₂-plasma
2	Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
3	Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers