Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Joseph Aubuchon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Joseph Aubuchon returned 2 record(s).

NumberTitle
1Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
2Plasma Enhanced Atomic Layer Deposition of TaN Films for Advanced Interconnects