A. Franquet Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by A. Franquet returned 2 record(s).

Number	Title
1	Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
2	Nucleation mechanism during WS₂ plasma enhanced atomic layer deposition on amorphous Al₂O₃ and sapphire substrates