About Plasma ALD, LLC

The Plasma Enhanced Atomic Layer Deposition Publication Database is developed and maintained by Plasma ALD, LLC, a developer and supplier of inductively coupled plasma (ICP) sources for plasma-enhanced atomic layer deposition (PEALD), atomic layer etch (ALE), thin-film etching, surface cleaning, surface modification, and research plasma systems.

Our ICP sources are designed for integration with existing ALD and vacuum-processing equipment. Plasma ALD also provides plasma-source integration, process-development, and troubleshooting assistance based on decades of experience with low-pressure plasma processing and PEALD systems.

Researchers, universities, equipment manufacturers, and laboratories looking for an ICP plasma source or assistance adding plasma capability to a vacuum system can learn more on our Plasma Sources page.

Flexible Perovskite Photovoltaic Modules and Solar Cells Based on Atomic Layer Deposited Compact Layers and UV-Irradiated TiO₂ Scaffolds on Plastic Substrates

Type:

Journal

Info:

Advanced Energy Materials Volume 5, Issue 8, April 22, 2015

Date:

2015-01-07

DOI:

http://dx.doi.org/10.1002/aenm.201401808

Author Information

Name	Institution
Francesco Di Giacomo	University of Rome - Tor Vergata
Valerio Zardetto	Eindhoven University of Technology
Alessandra D'Epifanio	University of Rome - Tor Vergata
Sara Pescetelli	University of Rome - Tor Vergata
Fabio Matteocci	University of Rome - Tor Vergata
Stefano Razza	University of Rome - Tor Vergata
Aldo Di Carlo	University of Rome - Tor Vergata
Silvia Licoccia	University of Rome - Tor Vergata
Erwin (W.M.M.) Kessels	Eindhoven University of Technology
Mariadriana Creatore	Eindhoven University of Technology
Thomas M. Brown	University of Rome - Tor Vergata

Films

Plasma TiO₂

Hardware used: Oxford Instruments FlexAL

Ti(C_p^Me)(NMe₂)₃, Tris(dimethylamido)methylcyclopentadienyl titanium

CAS#: 0-0-0

CAS#: 7782-44-7

Deposition Temperature = 150C

Film/Plasma Properties

Substrates

ITO

Notes

FlexAL PEALD TiO₂ for perovskite solar cell blocking layer on ITO coated plastic substrates.
326