Publication Information

Title: Cathode encapsulation of organic light emitting diodes by atomic layer deposited Al2O3 films and Al2O3/a-SiNx:H stacks

Type: Journal

Info: Journal of Vacuum Science & Technology A 30, 01A131 (2012)

Date: 2011-11-01

DOI: http://dx.doi.org/10.1116/1.3664762

Author Information

Name

Institution

Eindhoven University of Technology

Philips

Philips

Eindhoven University of Technology

Eindhoven University of Technology

Films

Deposition Temperature = 25C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

Unknown

Unknown

Barrier Characteristics

Calcium Test

Custom

Water Vapor Transmission Rate (WVTR)

Calcium Test

Custom

Barrier Characteristics

OLED Illumination

Custom

Substrates

SiO2

OLED

Keywords

Encapsulation

Diffusion Barrier

Notes

633



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