Publication Information

Title: Cathode encapsulation of organic light emitting diodes by atomic layer deposited Al2O3 films and Al2O3/a-SiNx:H stacks

Type: Journal

Info: Journal of Vacuum Science & Technology A 30, 01A131 (2012)

Date: 2011-11-01

DOI: http://dx.doi.org/10.1116/1.3664762

Author Information

Name

Institution

Eindhoven University of Technology

Philips

Philips

Eindhoven University of Technology

Eindhoven University of Technology

Films

Deposition Temperature = 25C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

Unknown

-

Barrier Characteristics

Calcium Test

Custom

Water Vapor Transmission Rate (WVTR)

Calcium Test

Custom

Barrier Characteristics

OLED Illumination

Custom

Substrates

SiO2

OLED

Keywords

Encapsulation

Diffusion Barrier

Notes

633



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