Publication Information

Title:
Cathode encapsulation of organic light emitting diodes by atomic layer deposited Al2O3 films and Al2O3/a-SiNx:H stacks
Type:
Journal
Info:
Journal of Vacuum Science & Technology A 30, 01A131 (2012)
Date:
2011-11-01

Author Information

Name Institution
Wytze KeuningEindhoven University of Technology
P. van de WeijerPhilips
H. LifkaPhilips
Erwin (W.M.M.) KesselsEindhoven University of Technology
Mariadriana CreatoreEindhoven University of Technology

Films

Plasma Al2O3


Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: -

Characteristic: Barrier Characteristics
Analysis: Calcium Test

Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Calcium Test

Characteristic: Barrier Characteristics
Analysis: OLED Illumination

Substrates

SiO2
OLED

Keywords

Encapsulation
Diffusion Barrier

Notes

633