Matthieu J. Weber Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Matthieu J. Weber returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition
2Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
3In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
4Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation