Publication Information

Title:
Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
Type:
Journal
Info:
2013 Transducers Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII)
Date:
2013-06-13

Author Information

Name Institution
Fabian PurklUniversity of Freiburg
Timothy S. EnglishStanford University
Gary YamaRobert Bosch GmbH
J ProvineStanford University
Ashwin K. SamaraoRobert Bosch GmbH
Ando FeyhRobert Bosch GmbH
Bongsang KimRobert Bosch GmbH
Gary O'BrienRobert Bosch GmbH
Oliver AmbacherUniversity of Freiburg
R. T. HoweStanford University
Thomas W. KennyStanford University

Films


Plasma Al2O3


Film/Plasma Properties

Substrates

Silicon
Al2O3

Keywords

Notes

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