Search Plasma ALD Publication Database By...

Publication Information

Title: Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers

Type: Journal

Info: 2013 Transducers Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII)

Date: 2013-06-13

DOI: http://dx.doi.org/10.1109/Transducers.2013.6627067

Author Information

Name

Institution

University of Freiburg

Stanford University

Robert Bosch GmbH

Stanford University

Robert Bosch GmbH

Robert Bosch GmbH

Robert Bosch GmbH

Robert Bosch GmbH

University of Freiburg

Stanford University

Stanford University

Films

Deposition Temperature = 270C

94442-22-5

7782-44-7

Deposition Temperature = 270C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Silicon

Al2O3

Keywords

Notes

601


Follow @PlasmaALDGuy
Mark Sowa

Shortcuts



© 2014-2018 plasma-ald.com