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Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers

Type:
Journal
Info:
2013 Transducers Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII)
Date:
2013-06-13
DOI:
http://dx.doi.org/10.1109/Transducers.2013.6627067

Author Information

Name Institution
Fabian PurklUniversity of Freiburg
Timothy S. EnglishStanford University
Gary YamaRobert Bosch GmbH
J ProvineStanford University
Ashwin K. SamaraoRobert Bosch GmbH
Ando FeyhRobert Bosch GmbH
Bongsang KimRobert Bosch GmbH
Gary O'BrienRobert Bosch GmbH
Oliver AmbacherUniversity of Freiburg
R. T. HoweStanford University
Thomas W. KennyStanford University

Films

Plasma Pt

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
(Trimethyl)methylcyclopentadienylplatinum, MeCpMe3Pt
CAS#: 94442-22-5
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 270C

Plasma Al2O3

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 270C

Film/Plasma Properties

Substrates

Silicon
Al2O3

Notes

601