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Oliver Ambacher Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Oliver Ambacher returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Mechanical and electrical properties of plasma and thermal atomic layer deposited Al2O3 films on GaAs and Si
2Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers

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