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Oliver Ambacher Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Oliver Ambacher returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Mechanical and electrical properties of plasma and thermal atomic layer deposited Al2O3 films on GaAs and Si
2Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers

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