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Thomas W. Kenny Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Thomas W. Kenny returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
2Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
3Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
4Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide