Publication Information

Title:
Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
Type:
Journal
Info:
Ultramicroscopy Volume 166, July 2016, Pages 39-47
Date:
2016-04-08

Author Information

Name Institution
Timothy S. EnglishStanford University
J ProvineStanford University
Ann F. MarshallStanford University
Ai Leen KohStanford University
Thomas W. KennyStanford University

Films


Plasma Al2O3


Film/Plasma Properties

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Substrates

Keywords

Notes

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