
Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
Type:
Journal
Info:
Ultramicroscopy Volume 166, July 2016, Pages 39-47
Date:
2016-04-08
Author Information
Name | Institution |
---|---|
Timothy S. English | Stanford University |
J Provine | Stanford University |
Ann F. Marshall | Stanford University |
Ai Leen Koh | Stanford University |
Thomas W. Kenny | Stanford University |
Films
Plasma Pt
Plasma Al2O3
Film/Plasma Properties
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Substrates
Notes
884 |