Ai Leen Koh Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Ai Leen Koh returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops |