J Provine Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J Provine returned 12 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
2Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
3Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
4Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
5Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
6Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
7Plasma-enhanced atomic layer deposition of superconducting niobium nitride
8Plasma-enhanced atomic layer deposition of tungsten nitride
9Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
10Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
11Single-Cell Photonic Nanocavity Probes
12Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition


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