J Provine Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J Provine returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
2Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
3Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
4Plasma-enhanced atomic layer deposition of tungsten nitride
5Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
6Single-Cell Photonic Nanocavity Probes
7Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
8Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
9Plasma-enhanced atomic layer deposition of superconducting niobium nitride
10Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
11Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
12Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
13Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops