J Provine Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J Provine returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
2Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
3Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
4Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
5Plasma-enhanced atomic layer deposition of superconducting niobium nitride
6Single-Cell Photonic Nanocavity Probes
7Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
8Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
9Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
10Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
11Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
12Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
13Plasma-enhanced atomic layer deposition of tungsten nitride