J Provine Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J Provine returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
2Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
3Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
4Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
5Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
6Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
7Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
8Plasma-enhanced atomic layer deposition of superconducting niobium nitride
9Plasma-enhanced atomic layer deposition of tungsten nitride
10Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
11Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
12Single-Cell Photonic Nanocavity Probes
13Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition