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J Provine Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J Provine returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
2Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
3Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
4Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
5Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
6Plasma-enhanced atomic layer deposition of tungsten nitride
7Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
8Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
9Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
10Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
11Single-Cell Photonic Nanocavity Probes
12Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
13Plasma-enhanced atomic layer deposition of superconducting niobium nitride