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Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy
Innovative remote plasma source for atomic layer deposition for GaN devices
Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
Optical in situ monitoring of plasma-enhanced atomic layer deposition process
The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
Single-Cell Photonic Nanocavity Probes
Type:
Journal
Info:
Nano Lett, 2013, 13(11), pp 4999-5005
Date:
2013-02-06
Author Information
| Name | Institution |
|---|---|
| Gary Shambat | Stanford University |
| Sri-Rajasekhar Kothapalli | Stanford University |
| J Provine | Stanford University |
| Tomas Sarmiento | Stanford University |
| James Harris | Stanford University |
| Sanjiv Sam Gambhir | Stanford University |
| Jelena Vuckovic | Stanford University |
Films
Thermal ZrO2
Thermal Al2O3
Plasma SiO2
Film/Plasma Properties
Substrates
| GaAs |
Keywords
| Nanocavity |
| Biological Cell |
| Sensors |
| Protein Detection |
Notes
| 46 |