The publication database currently has 1695 entries.
Use Advanced Search for more complex searches
Recent Database Additions
Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
Gallium nitride thin films by microwave plasma-assisted ALD
Ferroelectricity of HfxZr1-xO2 thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition
Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium
Single-Cell Photonic Nanocavity Probes
Type:
Journal
Info:
Nano Lett, 2013, 13(11), pp 4999-5005
Date:
2013-02-06
Author Information
| Name | Institution |
|---|---|
| Gary Shambat | Stanford University |
| Sri-Rajasekhar Kothapalli | Stanford University |
| J Provine | Stanford University |
| Tomas Sarmiento | Stanford University |
| James Harris | Stanford University |
| Sanjiv Sam Gambhir | Stanford University |
| Jelena Vuckovic | Stanford University |
Films
Thermal ZrO2
Thermal Al2O3
Plasma SiO2
Film/Plasma Properties
Substrates
| GaAs |
Notes
| 46 |