Name

Institution

Gary Shambat

Stanford University

Sri-Rajasekhar Kothapalli

Stanford University

J Provine

Stanford University

Tomas Sarmiento

Stanford University

James Harris

Stanford University

Sanjiv Sam Gambhir

Stanford University

Jelena Vuckovic

Stanford University

Thermal ZrO₂ using Veeco - Ultratech - Cambridge NanoTech Fiji

Deposition Temperature = 200C

TDMAZr, (Me₂N)₄Zr, [(CH₃)₂N]₄Zr, Tetrakis(DiMethylAmido) Zirconium, Zirconium Dimethylamide

19756-04-8

Where to buy precursor

H₂O, Water

7732-18-5

Thermal Al₂O₃ using Veeco - Ultratech - Cambridge NanoTech Fiji

Deposition Temperature = 200C

TMA, AlMe₃, Trimethyl Aluminum

75-24-1

Where to buy precursor

H₂O, Water

7732-18-5

Plasma SiO₂ using Veeco - Ultratech - Cambridge NanoTech Fiji

Deposition Temperature = 200C

3DMASi, (Me₂N)₃SiH, [(CH₃)₂N]₃SiH, Tris(DiMethylAmido) Silane

15112-89-7

Where to buy precursor

O₂, Oxygen

7782-44-7

Characteristic

Analysis

Diagnostic

GaAs

Nanocavity

Biological Cell

Sensors

Protein Detection

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