Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

Contact us for more information.


Timothy S. English Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Timothy S. English returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
2Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
3Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
4Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide