Timothy S. English Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Timothy S. English returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
2Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide
3Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
4Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops