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Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition
Type:
Journal
Info:
Appl. Phys. Express 13 087001
Date:
2020-07-20
Author Information
| Name | Institution |
|---|---|
| Daiki Ishi | Tokyo Metropolitan University |
| Yuichiro Ezoe | Tokyo Metropolitan University |
| Kumi Ishikawa | Japan Aerospace Exploration Agency |
| Masaki Numazawa | Tokyo Metropolitan University |
| Aoto Fukushima | Tokyo Metropolitan University |
| Ryota Otsubo | Tokyo Metropolitan University |
| Hikaru Suzuki | Tokyo Metropolitan University |
| Tatsuya Yuasa | Tokyo Metropolitan University |
| Sae Sakuda | Tokyo Metropolitan University |
| Tomoki Uchino | Tokyo Metropolitan University |
| Maiko Fujitani | Tokyo Metropolitan University |
| Kazuhisa Mitsuda | Japan Aerospace Exploration Agency |
| Mark J. Sowa | Veeco Instruments |
Films
Thermal Al2O3
Plasma Pt
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Morphology, Roughness, Topography
Analysis: Profilometry
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Substrates
| Silicon |
| Al2O3 |
Notes
| 1595 |