Mark J. Sowa Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mark J. Sowa returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
2	Plasma-enhanced atomic layer deposition of superconducting niobium nitride
3	Plasma-enhanced atomic layer deposition of titanium vanadium nitride
4	Plasma-enhanced atomic layer deposition of tungsten nitride
5	Plasma-enhanced atomic layer deposition of vanadium nitride
6	Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition

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