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The publication database currently has 1636 entries.
203 Films Compositions
274 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics
91 Theses
5041 Authors

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Recent Database Additions
Plasma-enhanced atomic layer deposited indium oxide film using a novel dimethylbutylamino-trimethylindium precursor for thin film transistors Atomic layer deposition of ferroelectric Hf0.5Zr0.5O2 on single-layer, CVD-grown graphene Electron-enhanced atomic layer deposition of silicon thin films at room temperature
Search 1636 plasma ALD publications by:
203 Films Compositions
274 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics

Mark J. Sowa Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mark J. Sowa returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition
2Performance of Samples with Novel SRF Materials and Growth Techniques
3Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
4Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
5Plasma-enhanced atomic layer deposition of superconducting niobium nitride
6Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
7Plasma-enhanced atomic layer deposition of titanium vanadium nitride
8Plasma-enhanced atomic layer deposition of tungsten nitride
9Plasma-enhanced atomic layer deposition of vanadium nitride
10Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition

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