Mark J. Sowa Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mark J. Sowa returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
2Plasma-enhanced atomic layer deposition of titanium vanadium nitride
3Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
4Plasma-enhanced atomic layer deposition of tungsten nitride
5Plasma-enhanced atomic layer deposition of superconducting niobium nitride
6Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
7Performance of Samples with Novel SRF Materials and Growth Techniques
8Plasma-enhanced atomic layer deposition of vanadium nitride
9Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition
10Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor