Mark J. Sowa Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mark J. Sowa returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
2Plasma-enhanced atomic layer deposition of superconducting niobium nitride
3Plasma-enhanced atomic layer deposition of titanium vanadium nitride
4Plasma-enhanced atomic layer deposition of tungsten nitride
5Plasma-enhanced atomic layer deposition of vanadium nitride
6Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition