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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Mark J. Sowa Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mark J. Sowa returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-enhanced atomic layer deposition of ruthenium metal on free-standing carbon nanotube forest for 3D flexible binder-less supercapacitor electrodes
2Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
3Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
4Plasma-enhanced atomic layer deposition of titanium vanadium nitride
5Performance of Samples with Novel SRF Materials and Growth Techniques
6Plasma-enhanced atomic layer deposition of tungsten nitride
7Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
8Plasma-enhanced atomic layer deposition of vanadium nitride
9Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
10Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
11RF Characterization of Novel Superconducting Materials and Multilayers
12Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition
13Plasma-enhanced atomic layer deposition of superconducting niobium nitride