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Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
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Mark J. Sowa Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mark J. Sowa returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-enhanced atomic layer deposition of superconducting niobium nitride
2Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
3Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
4Plasma-enhanced atomic layer deposition of ruthenium metal on free-standing carbon nanotube forest for 3D flexible binder-less supercapacitor electrodes
5Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition
6Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
7Plasma-enhanced atomic layer deposition of tungsten nitride
8RF Characterization of Novel Superconducting Materials and Multilayers
9Plasma-enhanced atomic layer deposition of vanadium nitride
10Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
11Plasma-enhanced atomic layer deposition of titanium vanadium nitride
12Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
13Performance of Samples with Novel SRF Materials and Growth Techniques