Mark J. Sowa Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mark J. Sowa returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Performance of Samples with Novel SRF Materials and Growth Techniques
2Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
3Plasma-enhanced atomic layer deposition of tungsten nitride
4Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
5Plasma-enhanced atomic layer deposition of superconducting niobium nitride
6Plasma-enhanced atomic layer deposition of ruthenium metal on free-standing carbon nanotube forest for 3D flexible binder-less supercapacitor electrodes
7Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
8Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
9RF Characterization of Novel Superconducting Materials and Multilayers
10Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition
11Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
12Plasma-enhanced atomic layer deposition of titanium vanadium nitride
13Plasma-enhanced atomic layer deposition of vanadium nitride