2021 Year in Review
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202 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
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88 Theses
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Tailoring angular selectivity in SiO2 slanted columnar thin films using atomic layer deposition of titanium nitride
Characterization of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition
Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
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Growth of silica nanowires in vacuum
Type:
Journal
Info:
CrystEngComm, 2015, 17, 2406-2412
Date:
2015-02-04
Author Information
| Name | Institution |
|---|---|
| V. Gurylev | National Tsing Hua University |
| C. C. Wang | Feng Chia University |
| Y. C. Hsueh | National Tsing Hua University |
| T.-P. Perng | National Tsing Hua University |
Films
Film/Plasma Properties
Substrates
| Silicon |
Keywords
Notes
| 476 |