Search 1530 plasma ALD publications by:
Search 1530 plasma ALD publications by:
Publication Information
Title:
Growth of silica nanowires in vacuum
Type:
Journal
Info:
CrystEngComm, 2015, 17, 2406-2412
Date:
2015-02-04
Author Information
Name | Institution |
---|---|
V. Gurylev | National Tsing Hua University |
C. C. Wang | Feng Chia University |
Y. C. Hsueh | National Tsing Hua University |
T.-P. Perng | National Tsing Hua University |
Films
Film/Plasma Properties
Substrates
Silicon |
Keywords
Notes
476 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |