Publication Information

Title:
Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions
Type:
Journal
Info:
Microsc. Microanal. 21 (Suppl 3), 2015
Date:
2015-09-23

Author Information

Name Institution
M. KawasakiJEOL USA Inc.
C.N. HsiaoNational Applied Research Laboratories
Jer-Ren YangNational Taiwan University
Makoto ShiojiriKyoto Institute of Technology

Films

Plasma Pt


Plasma Ru


Plasma Ru


Film/Plasma Properties

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Characteristic: Images
Analysis: STM, Scanning Tunneling Microscopy

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy

Substrates

Silicon
Amorphous C

Keywords

Notes

535