Plasma ALD, LLC Consulting


2024 Year in Review


The publication database currently has 1748 entries.
219 Films
293 Precursors
81 Dep Hardware Sets
258 Characteristics
99 Theses
5407 Authors

Use Advanced Search for more complex searches


2021 Year in Review
2023 Year in Review
2022 Year in Review
ALD Links


Makoto Shiojiri Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Makoto Shiojiri returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Ultralow threading dislocation density in GaN epilayer on near-strain-free GaN compliant buffer layer and its applications in hetero-epitaxial LEDs
2Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions
3Ultraviolet Electroluminescence from Nitrogen-Doped ZnO-Based Heterojuntion Light-Emitting Diodes Prepared by Remote Plasma in situ Atomic Layer-Doping Technique
4Low-temperature atomic layer epitaxy of AlN ultrathin films by layer-by-layer, in-situ atomic layer annealing
5Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions

© 2014-2025 plasma-ald.com