Your search for plasma enhanced atomic layer deposition publications authored by Makoto Shiojiri returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Low-temperature atomic layer epitaxy of AlN ultrathin films by layer-by-layer, in-situ atomic layer annealing|
|2||Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions|
|3||Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions|
|4||Ultralow threading dislocation density in GaN epilayer on near-strain-free GaN compliant buffer layer and its applications in hetero-epitaxial LEDs|
|5||Ultraviolet Electroluminescence from Nitrogen-Doped ZnO-Based Heterojuntion Light-Emitting Diodes Prepared by Remote Plasma in situ Atomic Layer-Doping Technique|
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