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An economical, compact inductively coupled plasma source.

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  • Plasma-Enhanced Atomic Layer Deposition
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Jer-Ren Yang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jer-Ren Yang returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions
2Ultralow threading dislocation density in GaN epilayer on near-strain-free GaN compliant buffer layer and its applications in hetero-epitaxial LEDs
3Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions