Jer-Ren Yang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jer-Ren Yang returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Structural investigation of Ru/Pt nanocomposite films prepared by plasma-enhanced atomic layer depositions
2Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions
3Ultralow threading dislocation density in GaN epilayer on near-strain-free GaN compliant buffer layer and its applications in hetero-epitaxial LEDs