Title: Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates
Type: Journal
Info: J. Vac. Sci. Technol. A 33(1), Jan/Feb 2015
Date: 2014-10-31
DOI: http://dx.doi.org/10.1116/1.4901459
Name
Institution
University of Colorado, Boulder
Characteristic
Analysis
Diagnostic
224
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