2021 Year in Review
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202 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
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88 Theses
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Tailoring angular selectivity in SiO2 slanted columnar thin films using atomic layer deposition of titanium nitride
Characterization of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition
Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
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Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates
Type:
Journal
Info:
J. Vac. Sci. Technol. A 33(1), Jan/Feb 2015
Date:
2014-10-31
Author Information
| Name | Institution |
|---|---|
| Joel W. Clancey | University of Colorado, Boulder |
Films
Thermal Al2O3
Thermal W
Plasma Pt
Thermal W
Film/Plasma Properties
Substrates
Keywords
Notes
| 224 |