The publication database currently has 1528 entries.
Search from:
189 Films Compositions
401 Precursors and Plasma Gases
74 Deposition Hardwares
238 Film and Plasma Characteristics
81 Theses
Use Multifactor Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)
ALD Links
About plasma-ald.com
Contact Us
Advertising
Recent Database Additions
Development and characterization of an atmospheric pressure plasma reactor compatible with spatial ALD
ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition: Material Properties Within and Outside the "Atomic Layer Deposition Window"
Aluminum nitride thin films deposited by hydrogen plasma enhanced and thermal atomic layer deposition
Search 1528 plasma ALD publications by:
Search 1528 plasma ALD publications by:
Publication Information
Title:
Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates
Type:
Journal
Info:
J. Vac. Sci. Technol. A 33(1), Jan/Feb 2015
Date:
2014-10-31
Author Information
| Name | Institution |
|---|---|
| Joel W. Clancey | University of Colorado, Boulder |
Films
Thermal Al2O3
Thermal W
Plasma Pt
Thermal W
Film/Plasma Properties
Substrates
Keywords
Notes
| 224 |
Popular Precursors
Top Authors
| Erwin (W.M.M.) Kessels |
| Hyeongtag Jeon |
| Hyungjun Kim |
| Mauritius C. M. (Richard) van de Sanden |
| Christophe Detavernier |