Search 1528 plasma ALD publications by:
Search 1528 plasma ALD publications by:
Publication Information
Title:
Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates
Type:
Journal
Info:
J. Vac. Sci. Technol. A 33(1), Jan/Feb 2015
Date:
2014-10-31
Author Information
Name | Institution |
---|---|
Joel W. Clancey | University of Colorado, Boulder |
Films
Thermal Al2O3
Thermal W
Plasma Pt
Thermal W
Film/Plasma Properties
Substrates
Keywords
Notes
224 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |