Your search for plasma enhanced atomic layer deposition publications discussing W films returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM|
|2||Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates|
|3||Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor|
|4||Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes|
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