W Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing W films returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
2Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates
3Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM
4Growth mechanism and electrical properties of tungsten films deposited by plasma-enhanced atomic layer deposition with chloride and metal organic precursors
5Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes