
Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes
Type:
Journal
Info:
physica status solidi (a) Volume 212, Issue 7, pages 1607-1614, July 2015
Date:
2015-04-30
Author Information
Name | Institution |
---|---|
Mengdi Yang | University of Twente |
Antonius A. I. Aarnink | University of Twente |
Alexey Y. Kovalgin | University of Twente |
Rob A. M. Wolters | University of Twente |
Jurriaan Schmitz | University of Twente |
Films
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Substrates
SiO2 |
Notes
488 |