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The publication database currently has 1636 entries.
203 Films Compositions
274 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics
91 Theses
5041 Authors

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Plasma-enhanced atomic layer deposited indium oxide film using a novel dimethylbutylamino-trimethylindium precursor for thin film transistors Atomic layer deposition of ferroelectric Hf0.5Zr0.5O2 on single-layer, CVD-grown graphene Electron-enhanced atomic layer deposition of silicon thin films at room temperature
Search 1636 plasma ALD publications by:
203 Films Compositions
274 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics

Antonius A. I. Aarnink Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Antonius A. I. Aarnink returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
2Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
3Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes
4Hot-Wire Generated Atomic Hydrogen and its Impact on Thermal ALD in TiCl4/NH3 System
5Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films
6PEALD AlN: controlling growth and film crystallinity

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