plasma-ald.com
  • PEALD Publication Database
    Films Precursors Hardware Authors Film and Plasma Characteristics Theses Multi-factor Search
  • Mark's LinkedIn Profile
  • Contact Us
  • ALD Links
The publication database currently has 1555 entries.
Search from:
191 Films Compositions
401 Precursors and Plasma Gases
75 Deposition Hardwares
241 Film and Plasma Characteristics
83 Theses

Use Multifactor Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)


ALD Links
Contact Us
Advertising
LinkedIn Profile

Recent Database Additions
Plasma enhanced atomic layer deposition of thin film Li1+xMn2-xO4 for realization of all solid-state 3D lithium-ion microbatteries AlN PEALD with TMA and forming gas: study of plasma reaction mechanisms Remote Plasma Atomic Layer Deposition of SiNx Using Cyclosilazane and H2/N2 Plasma
Search 1555 plasma ALD publications by:
191 Films Compositions
401 Precursors and Plasma Gases
75 Deposition Hardwares
241 Film and Plasma Characteristics

Antonius A. I. Aarnink Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Antonius A. I. Aarnink returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
2Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
3Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes
4Hot-Wire Generated Atomic Hydrogen and its Impact on Thermal ALD in TiCl4/NH3 System
5Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films
6PEALD AlN: controlling growth and film crystallinity

© 2014-2021 plasma-ald.com

Popular Films
NbN
AlN
Ag
GaN
SiO2

Recently Added Films
RuTa
RuC
GaAs
LiNiOx
FeSnO

Popular Precursors
Bis(DiEthylAmido)Silane
Dicobalt Hexacarbonyl Tert-ButylAcetylene
Tris(DiMethylAmido) Cyclopentadienyl Hafnium
Tris(DiEthylamido) (Tert-Butylimido) Niobium
Trimethoxy(pentamethylcyclopentadienyl) Titanium

Top Authors
Erwin (W.M.M.) Kessels
Hyeongtag Jeon
Hyungjun Kim
Mauritius C. M. (Richard) van de Sanden
Christophe Detavernier