Alexey Y. Kovalgin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexey Y. Kovalgin returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
2Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes
3Hot-Wire Generated Atomic Hydrogen and its Impact on Thermal ALD in TiCl4/NH3 System
4Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films
5PEALD AlN: controlling growth and film crystallinity