Alexey Y. Kovalgin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexey Y. Kovalgin returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films
2Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
3Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
4PEALD AlN: controlling growth and film crystallinity
5Hot-Wire Generated Atomic Hydrogen and its Impact on Thermal ALD in TiCl4/NH3 System
6Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes