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The publication database currently has 1531 entries.
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189 Films Compositions
401 Precursors and Plasma Gases
74 Deposition Hardwares
239 Film and Plasma Characteristics
82 Theses

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Recent Database Additions
Ultrathin effective TiN protective films prepared by plasma-enhanced atomic layer deposition for high performance metallic bipolar plates of polymer electrolyte membrane fuel cells Titanium oxynitride films for surface passivation of crystalline silicon deposited by plasma-enhanced atomic layer deposition to improve electrical conductivity Probing the Origin and Suppression of Vertically Oriented Nanostructures of 2D WS2 Layers
Search 1531 plasma ALD publications by:
189 Films Compositions
401 Precursors and Plasma Gases
74 Deposition Hardwares
239 Film and Plasma Characteristics

Alexey Y. Kovalgin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alexey Y. Kovalgin returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
2Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
3Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes
4Hot-Wire Generated Atomic Hydrogen and its Impact on Thermal ALD in TiCl4/NH3 System
5Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films
6PEALD AlN: controlling growth and film crystallinity

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