Your search for plasma enhanced atomic layer deposition publications authored by Alexey Y. Kovalgin returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor|
|2||Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes|
|3||Hot-Wire Generated Atomic Hydrogen and its Impact on Thermal ALD in TiCl4/NH3 System|
|4||Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films|
|5||PEALD AlN: controlling growth and film crystallinity|
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