Your search for plasma enhanced atomic layer deposition publications authored by Rob A. M. Wolters returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor|
|2||Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes|
|3||Hot-Wire Generated Atomic Hydrogen and its Impact on Thermal ALD in TiCl4/NH3 System|
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