Disilane, Si2H6, CAS# 1590-87-0

Where to buy

NumberVendorRegionLink
1Yoodatech (Shanghai) Co., LtdDisilane, Si2H6 - contact maggie@yoodatech.com

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Si atomic layer epitaxy based on Si2H6 and remote He plasma bombardment
2Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates
3Atomic Layer Epitaxy of Group IV Materials: Surface Processes, Thin Films, Devices and Their Characterization
4Electron-enhanced atomic layer deposition of silicon thin films at room temperature